China's Self-Developed DUV Lithography Machines Enter Mass Production, Changxin Storage May Be Among First Customers

A state-supported Chinese company has begun mass production of self-developed DUV (Deep Ultraviolet) lithography equipment, marking a significant advancement in the localization of China's semiconductor industry. The company plans to produce about five DUV lithography machines by 2026, expanding to approximately 20 machines by 2027. Although there is still a gap in capacity compared to Dutch lithography giant ASML (which delivered 131 immersion DUV lithography systems last year), the mass production of domestic DUV equipment signifies a move towards a self-controlled chip manufacturing supply chain in China. Sources indicate that this batch of domestic DUV lithography machines is planned for delivery to major chip manufacturers such as SMIC, Hua Hong Semiconductor, and Changxin Storage. As a representative of China's DRAM industry, Changxin Storage is expected to become an important application partner for domestically produced advanced semiconductor manufacturing equipment. If the domestic DUV equipment operates stably in the production lines of companies like Changxin Storage, it will further reduce the reliance of China's memory chip industry on overseas critical equipment.

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